On the formation of copper nanoparticles in nanocluster aggregation source

The influence of pressure and type of inert gas (Ar and Kr) on the morphology and size distribution of nanoparticles produced in a nanocluster source is studied experimentally. The experimental data are used to validate the model of cluster formation from a supersaturated atomic vapor in an inert buffer gas, which has been developed in our previous paper. The model predictions are in accordance with the experimental findings. (C) 2015 American Vacuum Society.