期刊
FUNCTIONAL MATERIALS LETTERS
卷 2, 期 2, 页码 61-66出版社
WORLD SCIENTIFIC PUBL CO PTE LTD
DOI: 10.1142/S1793604709000570
关键词
Functionally graded Ni-Ti; shape memory alloys; heated target; EELSMODEL; thin film; multilayer; TEM
资金
- FWO [G.0465.05]
- DoD Telemedicine and Advanced Technology Research Center (TATRC) [W81XWH-07-1-0672]
A functionally graded multilayer Ni-Ti thin film was deposited on a SiO2/Si substrate by d.c.sputtering using a ramped heated Ni-Ti alloy target. The stand-alone films were crystallized at 500 degrees C in vacuum better than 10(-7) Torr. Transmission electron microscopy micrographs taken along the film cross section show two distinct regions, thin and thick, with weak R and B2 phases, respectively. The film compositions along the thickness were measured and quantified using the standard-less EELSMODEL method. The film deposited during the initial thermal ramp (thin regions) displays an average of 54 at.% Ni while the film deposited at a more elevated target temperature (thick regions) shows about 51 at.% Ni.
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