期刊
FREQUENZ
卷 62, 期 3-4, 页码 96-99出版社
FACHVERLAG SCHIELE SCHON
DOI: 10.1515/FREQ.2008.62.3-4.96
关键词
ICP-CVD; MOEMS; DBR; SiOx; SiNx; tunable optical filter; VCSEL
We present the realization and investigation of tunable dielectric distributed bragg reflectors consisting of silicon oxide and silicon nitride deposited by an inductively coupled plasma chemical vapor deposition. These dielectric mirrors are used for tunable optical Fabry-Perot filters and for tunable vertical cavity surface emitting laser operating at wavelengths around 1.5 mu m.
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