期刊
ACS NANO
卷 9, 期 6, 页码 6031-6040出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsnano.5b00978
关键词
nanosphere lithography; moire nanosphere lithography; sequential stacking; moire pattern; plasmon; metasurface
类别
资金
- Beckman Young Investigator Program
We have developed moire nanosphere lithography (M-NSL), which incorporates in plane rotation between neighboring monolayers, to extend the patterning capability of conventional nanosphere lithography (NSL). NSL, which uses self-assembled layers of nnonodisperse micro/nanospheres as masks, is a low-cost, scalable nanofabrication technique and has been widely employed to fabricate various nanoparticle arrays. Combination with dry etching and/or angled deposition has greatly enriched the family of nanoparticles NSL can yield. In this work, we introduce a variant of this technique, which uses sequential stacking of polystyrene nanosphere monolayers to form a bilayer crystal instead of conventional spontaneous self-assembly. Sequential stacking leads to the formation of moire patterns other than the usually observed thermodynamically stable configurations. Subsequent O-2 plasma etching results in a variety of complex nanostructures. Using the etched moire patterns as masks, we have fabricated complementary gold nanostructures and studied their optical properties. We believe this facile technique provides a strategy to fabricate complex nanostructures or metasurfaces.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据