相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article
Physics, Applied
Magnetron Sputtering of Aluminium Nitride Thin Films for Thermal Management
Cyril Duquenne et al.
PLASMA PROCESSES AND POLYMERS (2007)
Article
Materials Science, Coatings & Films
Thickness dependence of the properties of highly c-axis textured AlN thin films
F Martin et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2004)