期刊
ENERGY & ENVIRONMENTAL SCIENCE
卷 4, 期 8, 页码 2625-2629出版社
ROYAL SOC CHEMISTRY
DOI: 10.1039/c0ee00792g
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资金
- National Nature Science Foundations [60890192, 50872146, 60877006]
A new GaN lateral epitaxial overgrowth (LEO) technique using a chemical-etched grooved sapphire substrate is demonstrated here. The substrate fabrication, selective growth mechanism and dislocation reduction mechanism are discussed. By applying this technique, improvement in the quality of wing tilt free GaN LEO films and enhancement of GaN LEDs can be achieved.
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