Thin-film transmission lines using cyclic olefin copolymer for millimetre-wave and terahertz integrated circuits

Thin-film microstrip lines and a grounded coplanar waveguide using a cyclic-olefin copolymer as low-loss thin film have been fabricated and characterised up to 220 GHz. Attenuation as low as 0.6 dB/mm around 220 GHz has been measured on a grounded coplanar waveguide with a 22 mu m-thick cyclic-olefin copolymer thin film.