期刊
ELECTRONICS LETTERS
卷 44, 期 14, 页码 858-U183出版社
INST ENGINEERING TECHNOLOGY-IET
DOI: 10.1049/el:20080853
关键词
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Surface-normal optical filters are reported based on Fano resonances in patterned single crystalline silicon nanomembranes (SiNM), which were fabricated and transferred onto transparent glass substrates using a disruptive wet transfer process. The measured filter transmission results agree well with the design using a three-dimensional finite-difference time-domain technique. Using the SiNM wet transfer and stacking process, vertically stacked ultra-compact surface normal filters, switches, modulators and spectrally-selective photodetectors will become feasible.
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