Surface-normal Fano filters based on transferred silicon nanomembranes on glass substrates

Surface-normal optical filters are reported based on Fano resonances in patterned single crystalline silicon nanomembranes (SiNM), which were fabricated and transferred onto transparent glass substrates using a disruptive wet transfer process. The measured filter transmission results agree well with the design using a three-dimensional finite-difference time-domain technique. Using the SiNM wet transfer and stacking process, vertically stacked ultra-compact surface normal filters, switches, modulators and spectrally-selective photodetectors will become feasible.