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Review Paper: Transparent Amorphous Oxide Semiconductor Thin Film Transistor

期刊

ELECTRONIC MATERIALS LETTERS
卷 7, 期 1, 页码 1-11

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KOREAN INST METALS MATERIALS
DOI: 10.1007/s13391-011-0301-x

关键词

Oxide semiconductor; thin film transistor; transparent; reliability

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Thin film transistors (TFTs) with oxide semiconductors have drawn great attention in the last few years, especially for large area electronic applications, such as high resolution active matrix liquid crystal displays (AMLCDs) and active matrix organic light-emitting diodes (AMOLEDs), because of their high electron mobility and spatial uniform property. This paper reviews and summarizes recent emerging reports that include potential applications, oxide semiconductor materials, and the impact of the fabrication process on electrical performance. We also address the stability behavior of such devices under bias/illumination stress and critical factors related to reliability, such as the gate insulator, the ambient and the device structure.

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