期刊
ELECTRONIC MATERIALS LETTERS
卷 5, 期 1, 页码 51-54出版社
KOREAN INST METALS MATERIALS
DOI: 10.3365/eml.2009.03.051
关键词
poisson's ratio; thin films; x-ray diffraction; copper film
A method to determine Poisson's ratio of a crystalline thin film on a substrate without sophisticated equipment and/or specimens is presented. The method is based on the combining x-ray diffraction and in situ substrate bending and the three components of the induced strains were measured by x-ray diffraction experiments using the well-known sin(2) psi method. The method allows one to extract the Poisson's ratio of the unpatterned thin films on substrates in a simple way and with a good precision. As an example, Poisson's ratio of a sputter-deposited copper film on a low-carbon steel substrate was measured.
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