Tracing the origin of oxygen for La0.6Sr0.4MnO3 thin film growth by pulsed laser deposition

We report on the semi-quantitative analysis of pulsed laser induced plasma species as well as thin film compositions of La0.6Sr0.4MnO3 grown on SrTiO3 substrates under various background pressure regimes using an O-18 isotope labelled La0.6Sr0.4MnO3 target. The importance of negative metal-oxygen or positive metal-oxygen ions to influence the final oxygen composition of the thin film is illustrated through the use of mass spectrometry, where the chemical reactions between the laser ablated target species with the oxygen background molecules are directly characterized. We find that the influence of metal-oxygen negative ions is not as important as the metal-oxygen positive ions to the final oxygen composition of the LSMO film, due to their low stability in high background partial pressures. Furthermore, we observe that the oxygen incorporated in La0.6Sr0.4MnO3 thin films coming from the target is similar to 44%, 29% and 1% at 2 x 10(-3) mbar, 1 x 10(-2) mbar and 2 x 10(-1) mbar, respectively. When growing films at 10(-1) mbar on O-18(2) exchanged substrates, almost all oxygen originates from the background and almost none from the substrate or target.