期刊
ELECTROCHIMICA ACTA
卷 54, 期 17, 页码 4262-4268出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.electacta.2009.02.085
关键词
Anodization; Self-organization; Titania nanotubes; Li-ion microbatteries; Anode materials
资金
- Ministerio de Educacion y Ciencia through the Programa Jose Castillejo and Junta de Andalucia [FQM 1447]
- ANR Programme Blanc
- European Research Institute ALISTORE
The use of self-organized TiO2 nanotube arrays electrochemically grown onto Si is investigated for the fabrication of an alternative electrode dedicated to on-chip Li-ion 2D microbatteries. Discharge/charge curves and cycling performance are studied in lithium-anode electrochemical test cells for both amorphous and crystalline titania nanotubes. At 5 mu A cm(-2) amorphous TiO2 nanotube layers onto Si deliver a maximum areal capacity of 89 mu Ah cm(-2) in the first reversible discharge and 56 mu Ah cm(-2) over 50 cycles. We demonstrate that these nanostructured thin film electrodes showing such electrochemical performances are compatible with IC technology. (C) 2009 Elsevier Ltd. All rights reserved.
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