期刊
ELECTROCHEMISTRY COMMUNICATIONS
卷 12, 期 2, 页码 210-212出版社
ELSEVIER SCIENCE INC
DOI: 10.1016/j.elecom.2009.11.026
关键词
Titanium dioxide; Nanotubes; Atomic layer deposition; Electrostatic capacitance; Anodic aluminum oxide
资金
- Ministry of Knowledge Economy, Republic of Korea
Titanium dioxide (TiO2) nanotubes are fabricated into anodic aluminum oxide (AAO) membrane via atomic layer deposition (ALD). For the ALD of TiO2, gaseous precursors, titanium (IV) isopropoxide and water are sequentially applied and chemically reacted with each other. A thickness of nanotubes is precisely controlled by the applied cycle numbers of ALD and the morphology of nanostructures is investigated by SEM and TEM. The amorphous property of TiO2 nanostructures is revealed by XRD and the composition of nanotubes is measured by TEM-EDX. The impurity contents and binding structure of the nanostructures are analyzed by XPS. The electrostatic capacitance of TiO2 nanotubes into AAO is 480 mu F/cm(2) and it is about 3 times higher compared with AAO membrane (172 mu F/cm(2)). (C) 2009 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据