4.0 Article

Thermal annealing effects on the atomic layer deposited LaAlO3 thin films on Si substrate

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article Engineering, Electrical & Electronic

Epitaxial growth of LaAlO3 on Si(001) using interface engineering

C. Merckling et al.

MICROELECTRONICS RELIABILITY (2007)

Article Physics, Applied

High temperature stability of lanthanum silicate dielectric on Si (001)

J. S. Jur et al.

APPLIED PHYSICS LETTERS (2007)

Article Electrochemistry

Thermally induced atomic transport in nanometric LaAlON films on Si

K. P. Bastos et al.

ELECTROCHEMICAL AND SOLID STATE LETTERS (2007)

Article Electrochemistry

Electrical characteristics of LaAlO3 gate dielectrics prepared by high-pressure hydrogen post-deposition annealing

Musarrat Hasan et al.

ELECTROCHEMICAL AND SOLID STATE LETTERS (2006)

Article Engineering, Electrical & Electronic

Lanthanum aluminate by atomic layer deposition and molecular beam epitaxy

DH Triyoso et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2005)

Article Chemistry, Physical

Surface characterisation and interface studies of high-k materials by XPS and TOF-SIMS

A Besmehn et al.

APPLIED SURFACE SCIENCE (2005)

Article Physics, Applied

The interface between single crystalline (001) LaAlO3 and (001) silicon

DO Klenov et al.

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS (2005)

Article Physics, Applied

Formation of LaAlO3 films on Si(100) substrates using molecular beam deposition

BE Park et al.

APPLIED PHYSICS LETTERS (2003)