4.6 Article

Oxidation as A Means to Remove Surface Contaminants on Cu Foil Prior to Graphene Growth by Chemical Vapor Deposition

期刊

JOURNAL OF PHYSICAL CHEMISTRY C
卷 119, 期 23, 页码 13363-13368

出版社

AMER CHEMICAL SOC
DOI: 10.1021/acs.jpcc.5b03911

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资金

  1. China Scholarship Council (CSC)
  2. DFG [DFG RU1540/15-2]
  3. National Science Centre within the frames of the Sonata Programme, Korea [2014/13/D/ST5/02853]
  4. Sino-German Center for Research Promotion
  5. German Excellence Initiative via the Cluster of Excellence Center for Advancing Electronics Dresden (CfAED) [EXC1056]
  6. Ministry of Science, ICT & Future Planning, Republic of Korea [IBS-R011-D1-2015-A00] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

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One of the more common routes to fabricate graphene is by chemical vapor deposition (CVD). This is primarily because of its potential to scale up the process and produce large area graphene. For the synthesis of large area monolayer Cu is probably the most popular substrate since it has a low carbon solubility enabling homogeneous single-layer sheets of graphene to form. This process requires a very clean substrate. In this work we look at the efficiency of common pretreatments such as etching or wiping with solvents and compare them to an oxidation treatment at 1025 degrees C followed by a reducing process by annealing in H-2. The oxidation/reduction process is shown to be far more efficient allowing large area homogeneous single layer graphene formation without the presence of additional graphene flakes which form from organic contamination on the Cu surface.

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