期刊
DIAMOND AND RELATED MATERIALS
卷 23, 期 -, 页码 1-4出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2011.12.043
关键词
HiPIMS; HPPMS; Carbon ionization; Tetrahedral amorphous carbon; Diamond-like carbon
类别
资金
- Swedish Research Council (VR) [621-2008-3222, 623-2009-7348]
A strategy that facilitates a substantial increase of carbon ionization in magnetron sputtering discharges is presented in this work. The strategy is based on increasing the electron temperature in a high power impulse magnetron sputtering discharge by using Ne as the sputtering gas. This allows for the generation of an energetic C+ ion population and a substantial increase in the C+ ion flux as compared to a conventional Ar-HiPIMS process. A direct consequence of the ionization enhancement is demonstrated by an increase in the mass density of the grown films up to 2.8 g/cm(3); the density values achieved are substantially higher than those obtained from conventional magnetron sputtering methods. (C) 2012 Elsevier B.V. All rights reserved.
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