4.6 Article Proceedings Paper

Dissipation in single crystal diamond micromechanical annular plate resonators

期刊

DIAMOND AND RELATED MATERIALS
卷 20, 期 8, 页码 1204-1207

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2011.06.016

关键词

MEMS; NEMS; Ion Implantation; Sacrificial Layer; Fabrication

向作者/读者索取更多资源

We report measurements of energy dissipation in single crystal diamond annular plate resonators for temperatures ranging from 4 to 300 K. An order of magnitude reduction in dissipation is observed as the temperature is lowered from room temperature (1/Q = 5 x 10(-4)) to 30 K (1/Q = 5 x 10(-5)). (C) 2011 Elsevier B.V. All rights reserved.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.6
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据