期刊
DIAMOND AND RELATED MATERIALS
卷 20, 期 8, 页码 1204-1207出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2011.06.016
关键词
MEMS; NEMS; Ion Implantation; Sacrificial Layer; Fabrication
We report measurements of energy dissipation in single crystal diamond annular plate resonators for temperatures ranging from 4 to 300 K. An order of magnitude reduction in dissipation is observed as the temperature is lowered from room temperature (1/Q = 5 x 10(-4)) to 30 K (1/Q = 5 x 10(-5)). (C) 2011 Elsevier B.V. All rights reserved.
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