期刊
DIAMOND AND RELATED MATERIALS
卷 18, 期 5-8, 页码 957-962出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2009.02.008
关键词
Carbon nanotubes; Electronic applications; Chemical vapour deposition; Growth
The requirements for using carbon nanotubes as interconnects in future integrated circuits are defined. Growth techniques and some methods of their characterisation are described. The need to grow nanotubes on conducting metal substrates is pointed out and this effort is starting. (C) 2009 Elsevier B.V. All rights reserved.
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