期刊
DIAMOND AND RELATED MATERIALS
卷 17, 期 7-10, 页码 1513-1517出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2008.01.070
关键词
nanostructures; graphite; plasma CVD; electron beam excited plasma
Carbon nanowalls (CNWs), two-dimensional nanostructured carbon, were synthesized by an electron beam excited plasma-enhanced chemical vapor deposition (EBEP-CVD) employing a mixture of CH4 and H-2 at a total pressure of 2-4 Pa. High growth rate of 32 nm/min for the synthesis of well-defined, vertically aligned CNW film was attained at the total gas pressure of 4.0 Pa. CNWs were characterized by scanning electron microscopy, transmission electron microscopy, and micro-Raman spectroscopy. The EBEP-CVD proved to have a great potential for fabricating carbon nanostructures. (C) 2008 Elsevier B. V. All rights reserved.
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