期刊
DIAMOND AND RELATED MATERIALS
卷 17, 期 11, 页码 1831-1834出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2008.04.019
关键词
Diamond crystal; Diamond film; Reactive ion etching (RIE); Optical properties
类别
资金
- Australian Government's innovation statement Backing Australia's Ability
- Victorian Government's Science, Technology & Innovation Infrastructure Grants Program
Waveguide structures were fabricated in both nanocrystalline CVD diamond (NCD) and HPHT type 1b single crystal diamond using photolithography and reactive ion etching. The combination of these techniques allows the patterning of many long photonic structures simultaneously, making it easily scalable. Emphasis has been placed on reducing sidewall roughness to prevent loss due to scattering. In single crystal diamond a peak-to-peak roughness of approximately 10 nm (estimated from SEM images) was achieved for the majority of the structure sidewall. (C) 2008 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据