4.6 Article Proceedings Paper

Diamond nanoseeding on silicon:: Stability under H2 MPCVD exposures and early stages of growth

期刊

DIAMOND AND RELATED MATERIALS
卷 17, 期 7-10, 页码 1143-1149

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2008.01.008

关键词

nanoparticles; chemical vapor deposition; etching; surface characterization

向作者/读者索取更多资源

Detonation nanodiamond dispersed on silicon surfaces underwent different H-2 MPCVD exposures. The induced changes at the surface have been characterized in situ by XPS and XEELS. Then, a short CH4/H-2 growth step was applied. This sequential study revealed an excellent stability of detonation nanodiamond. The sp(3) etching rate is insufficient to remove nanodiamond even under intense H-2 plasma. The H-2 exposure could be successfully used to remove C-C sp(2) carbon without altering sp(3) seeds. Moreover, the formation of silicon carbide observed after the hydrogen treatment is thought to be helpful to enhance the adhesion of nanodiamond particles on the substrate. (C) 2008 Elsevier B.V. All rights reserved.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.6
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据