期刊
CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE
卷 17, 期 5, 页码 217-223出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.cossms.2013.09.003
关键词
Atom probe tomography; Review; Applications
资金
- DOE-Nuclear Energy University Program
- Electric Power Research Institute
- University of Michigan College of Engineering
Atom probe tomography has without any doubt become a routine technique to analyze the detailed three-dimensional chemistry of materials at the nanoscale. This article provides a general overview of what APT can reliably do today and what it might do tomorrow in terms of material characterization. The recent achievements in the analysis of new materials and new materials structures are first presented allowing some speculation on future possible developments. The ability to provide unique quantitative chemical information to link processing to device performance is then reviewed in the context of the recent nanowire and gate structures analyses. Finally examples of the systematic use of atom probe tomography to explore material behaviors and kinetic processes controlling microstructure evolution are presented. (C) 2013 Elsevier Ltd. All rights reserved.
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