期刊
CURRENT APPLIED PHYSICS
卷 11, 期 5, 页码 S172-S176出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.cap.2011.03.069
关键词
Liquid metal ion source; Focused ion beam; Suppressor; Electric field; Field ion emission
资金
- Ministry of Knowledge Economy [10011379]
- National Research Foundation of Korea [2010-0011377]
- MKE (The Ministry of Knowledge Economy), Korea under ITRC (Information Technology Research Center) [NIPA-2011-C1090-1111-0002]
- Kwangwoon University
- Korea Evaluation Institute of Industrial Technology (KEIT) [10011379] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
- National Research Foundation of Korea [2010-0011377] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
The liquid metal ion sources (LMIS) in focused ion beam (FIB) system have many advantages of high current density, high brightness and low ion energy spread. There are two electrodes being emitter and extractor for field ion emission in LMIS. But several LMIS have a new electrode called the suppressor. Characteristics of LMIS with a suppressor are investigated in terms of the electric field change due to the suppressor. The threshold and extinguishing voltages are investigated under the varying a suppressor voltage for a specified source voltage, and also currentevoltage (IeV) characteristics have been observed in terms of the voltage difference between the source and extractor for the various suppressor voltages. It is found that the emission current decreases as the suppressor voltage increases since the increase in the suppressor voltage reduces the electric field. It is also noted that the threshold and extinguishing voltages are increased as the suppressor voltage increases. (C) 2011 Elsevier B. V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据