期刊
JOURNAL OF NANOPARTICLE RESEARCH
卷 17, 期 3, 页码 -出版社
SPRINGER
DOI: 10.1007/s11051-015-2967-8
关键词
Anodic arc; Plasma synthesis; Ceramic nanopowder; Aerosol synthesis; TiC titaniumcarbide; TiN titaniumnitride; TiCN titaniumcarbonitride
资金
- Deutsche Forschungsgemeinschaft (DFG) [SFB 445]
Plasma methods using the direct evaporation of a transition metal are well suited for the cost-efficient production of ceramic nanoparticles. In this paper, we report on the development of a simple setup for the production of titanium-ceramics by reactive anodic arc evaporation and the characterization of the aerosol as well as the nanopowder. It is the first report on TiCXN1 - X synthesis in a simple anodic arc plasma. By means of extensive variations of the gas composition, it is shown that the composition of the particles can be tuned from titanium nitride over a titanium carbonitride phase (TiCXN1 - X) to titanium carbide as proven by XRD data. The composition of the plasma gas especially a very low concentration of hydrocarbons around 0.2 % of the total plasma gas is crucial to tune the composition and to avoid the formation of free carbon. Examination of the particles by HR-TEM shows that the material consists mostly of cubic single crystalline particles with mean sizes between 8 and 27 nm.
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