Single-source precursors to gallium and indium oxide thin films

Gallium and indium oxide thin films have received much attention in recent years for their wide range of applications. This review summarises the literature concerning single-source precursors and the methods employed to deposit gallium and indium oxide thin films using these compounds. An update of the literature outlining compounds which are potential single-source precursors to these materials is also included. (C) 2011 Elsevier B.V. All rights reserved.