期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 25, 期 6, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/25/6/065016
关键词
microvalve; pneumatic valve; hydraulic valve; fluid logic circuit; demultiplexer; valve control system
类别
资金
- Japan Ministry of Education, Culture, Sports Science and Technology, Scientific Basic Research of Osaka University [07113700, 19206046, 24760207]
- Grants-in-Aid for Scientific Research [24760207, 24686020, 19206046, 26630026] Funding Source: KAKEN
This paper proposes an efficient control method for the large-scale integration of microvalves in microfluidic systems. The proposed method can control 2(n) individual microvalves with 2n + 2 control lines (where n is an integer). The on-chip valves are closed by applying pressure to a control line, similar to conventional pneumatic microvalves. Another control line closes gate valves between the control line to the on-chip valves and the on-chip valves themselves, to preserve the state of the on-chip valves. The remaining control lines select an activated gate valve. While the addressed gate valve is selected by the other control lines, the corresponding on-chip valve is actuated by applying input pressure to the control line to the on-chip valves. Using this method would substantially reduce the number of world-to-chip connectors and off-chip valve controllers. Experiments conducted using a fabricated 2(8) microvalve array device, comprising 256 individual on-chip valves controlled with 18 (2 x 8 + 2) control lines, yielded switching speeds for the selected on-chip valve under 90 ms.
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