期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 25, 期 11, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/25/11/115005
关键词
surface acoustic wave; strain sensors; flexible glass; annealing effect
类别
资金
- NSFC [61274037, 61204124]
- Research Fund for the Doctoral Program of Higher Education of China [20120101110031]
- Innovation Platform of Micro/Nanodevices and Integration System, Zhejiang University
Flexible surface acoustic wave (SAW) strain sensors made on ZnO/ultrathin glass (100 mu m) substrates have been developed. The sensitivity of the SAW strain sensors under different strain angles and annealing temperatures, as well as the mechanical stability, are investigated. It was shown that the thickness of ZnO has a strong effect on the sensitivity of the strain sensors, and thicker ZnO makes sensors with better performance. Thermal annealing at a temperature up to 200 degrees C also improves the sensitivity of the strain sensor significantly. The temperature coefficient of frequency remains unchanged under different strains, showing good thermal stability. A cyclic bending test with the strain varied between zero and 2000 mu epsilon exhibits good mechanical stability and reliability of SAW strain sensors. All the results demonstrate the great potential of flexible SAW strain sensors for flexible electronic applications.
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