期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 24, 期 5, 页码 1384-1390出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2015.2399696
关键词
Microelectromechanical devices; microsensors; nanotechnology; gas detectors
类别
资金
- Ministry of Science, Research, and the Arts of Baden-Wurttemberg through the Zentrum fur Angewandte Forschung Ambient Assisted Living
This paper describes a novel micromachined platform serving as an interface between nanosized, gas sensitive metal oxide particles, and the macroscopic world. Through a combination of ink-jet printing and microelectromechanical systems technologies, it thus becomes possible to quickly test and characterize new nanosized metal oxide particles with respect to their gas sensitivity. Within the framework of this report, we describe the design considerations, thermal finite-element method simulations, processing, characterization, and utilization of the platform. Due to the low-power consumption, the hotplate provides an experimental platform to test nanoparticle-based metal oxide gas sensors for mobile systems. [2014-0215]
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据