期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 24, 期 1, 页码 126-133出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2014.2321013
关键词
Capillarity; fluidics; foil-to-foil integration; self-alignment; self-assembly
类别
资金
- Nano-Tera.Ch Swiss Research Initiative through the SelfSys Project
- Interuniversity Attraction Poles Programme under MicroMAST through the Belgian Science Policy Office [IAP 7/38]
This paper introduces a new integration technology for cost-effective high-precision mechanical and electrical integration of mesoscopic functional foil components onto foil substrates. The foil-to-foil assembly process is based on topological surface structuring via laser patterning that enables accurate capillarity-driven self-alignment of foil dies. The concurrent establishment of high-yield electrical interconnections is obtained through conductive adhesives. The foil surface energy controls the acceptance window of initial offsets for optimal self-alignment performance. The proposed topological patterning and system design enable alignment accuracies for centimeter-sized foil dies as high as 15 mu m, barely influenced by the evaporation of the assembly liquid and curing of the conductive paste. Full foil-to-foil system integration is demonstrated through the electrically functional assembly of an array of Au-sputtered capacitive humidity sensors onto a patterned base foil circuitry. [2014-0008]
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