期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 24, 期 4, 页码 1016-1028出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2014.2375811
关键词
Microactuators; microassembly; micromachining; microelectromechanical devices; transfer printing; active composite
类别
资金
- National Science Foundation [CMMI-0749028, CMMI-1301336]
- Directorate For Engineering
- Div Of Civil, Mechanical, & Manufact Inn [1301336] Funding Source: National Science Foundation
Soft locally active structures are becoming increasingly important in a number of applications, from microfluidic systems to soft robotics. In this paper, we develop an active polymeric composite membrane for use as an active stamp in the microtransfer printing process. The membrane is a composite of multiple layers: 1) a soft polydimethylsiloxane layer for transfer printing; 2) a lead zirconate titanate (PbZr0.52Ti0.48O3) layer for actuation; 3) metal layers for strain sensing and interconnects; and 4) patterned photopolymer (SU-8) layers for selectively tuning the compliance in the membrane and for handling. A novel and scalable fabrication approach that uses photolithography and microtransfer printing is developed for heterogeneously integrating the different materials into a functional structure. Approaches to designing and characterizing these active membranes are also discussed. Finally, the use of such membranes as stamps in the microtransfer printing process is demonstrated. By distributing actuation closer to critical regions of the tool, adaptability to local conditions for increased robustness and greater process flexibility is achieved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据