期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 24, 期 2, 页码 384-394出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2014.2332165
关键词
Energy harvesting; array; stack; electro magnetic; microfabricated power generator; integrated micromagnets; vibration
类别
资金
- National Science Foundation [ECCS-1308041]
- Defense Advanced Research Project Agency [N66001-13-1-4055]
- Div Of Electrical, Commun & Cyber Sys
- Directorate For Engineering [1308041] Funding Source: National Science Foundation
This paper presents a stacked microfabricated power generator that vertically integrates multiple magnets on silicon wafers in a batch process to enhance electromagnetic induction multiple times. The power output is increased by increasing the magnetic flux change for each power-generator unit in the stack, in addition to the increase due to increased number of units. A stack consisting of two arrays of four power-generator units is fabricated and characterized. Wax-bonded Nd-Fe-B powders are embedded in the silicon wafer and magnetized as an integrated micromagnet, which serves as a proof mass suspended by a parylene diaphragm. Dual-layer coils are isolated by a parylene layer, connected via a hole and fabricated with electroplating copper on the same wafer. Experimental results show an improvement by about a factor of four on the power output from the same coils when two power-generator arrays are stacked vertically. In particular, an array of four microfabricated power generators occupying a volume of 51 x 11 x 0.4 mm(3) in the stack produces an induced electromotive force of 1.02 mV with 0.55 nW power output when it is vibrated at 400 Hz with vibration amplitude of 10 mu m.
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