4.5 Article

Thin Flexible Thermal Ground Planes: Fabrication and Scaling Characterization

期刊

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 24, 期 6, 页码 2040-2048

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2015.2466540

关键词

Vapor chamber; thermal ground plane; flexible heat pipe; thermal management

资金

  1. U.S. Central Intelligence Agency [2013-13071200006]
  2. Defense Advanced Research Projects Agency [N6601-08-2006]
  3. State of Colorado through the Advanced Industries Accelerator
  4. Intelligence Community Postdoctoral Research Fellowship Program through the Office of the Director of National Intelligence

向作者/读者索取更多资源

Thermal ground planes (TGPs) are passive thermal management devices that utilize the latent heat associated with phase change to achieve high effective thermal conductance, similar to heat pipes. In this paper, we develop flexible TGPs with an ultra-thin thickness of 0.5 mm using copper-cladded polyimide as the encasing material, woven copper mesh as a wick, and electroplated copper pillars to support a vapor core. The lowest thermal resistance of one TGP is characterized to be only 1/3 that of an equivalently sized copper heat spreader. The effects of size scaling of evaporator and condenser, and overall TGP sizes on the thermal resistances of TGPs are experimentally characterized. A simple series thermal resistance model, which accounts for vapor core thermal resistance, is developed to predict the measured results. This experimentally validated model can be used for the design of TGPs with varying sizes of evaporator and condenser, and overall size. [2015-0032]

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