期刊
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS
卷 14, 期 4, 页码 -出版社
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
DOI: 10.1117/1.JMM.14.4.044506
关键词
nanolithography; nanopillars; silicon; plasma etching; tribology
类别
资金
- Netherlands Foundation for Fundamental Material Research (FOM)
- ERC-AG project Science F(r)iction
This article reports the results of the fabrication of large arrays of nanopillars for future tribological experiments. This fabrication focused on achieving a constant high aspect ratio up to 1:24 and a separation between each pair of adjacent pillars. Electron beam lithography was used to write patterns in hydrogen silsesquioxane (HSQ) negative tone resist. To achieve nanopillars of high aspect ratios and with smooth sides, deep reactive ion etching was employed with SF6 and O-2 at cryogenic temperatures. Finally, the residual HSQ was removed using CHF3/O-2 plasma etching in order to obtain a smooth finish. (C) The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License.
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