期刊
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY
卷 29, 期 12, 页码 5063-5067出版社
KOREAN SOC MECHANICAL ENGINEERS
DOI: 10.1007/s12206-015-1102-1
关键词
Hot embossing; Micromold; Mold deformation; Polydimethylsiloxane; Thermoplastic
资金
- International Collaborative R&D Program through the Korea Institute for the Advancement of Technology (KIAT) - Ministry of Trade, Industry and Energy [N0000894]
- Basic Science Research Program through the National Research Foundation of Korea (NRF) - Ministry of Science, ICT & Future Planning [NRF-2014R1A1A1008487]
A hot embossing process using a soft polydimethylsiloxane (PDMS) micromold was experimentally investigated. Although the PDMS micromold shows several advantages, including short fabrication time, high flexibility, and easy modification of surface properties, a mold deformation during the embossing process is inevitable because of its low Young's modulus. In this regard, hot embossing experiments were systematically carried out to investigate the effect of major processing parameters on the soft micromold deformation. By measuring characteristic geometrical dimensions of the replicated microfeatures from the deformed microcavity, the deformation behavior of the soft micromold was analyzed.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据