期刊
JOURNAL OF MACROMOLECULAR SCIENCE PART A-PURE AND APPLIED CHEMISTRY
卷 52, 期 2, 页码 124-129出版社
TAYLOR & FRANCIS INC
DOI: 10.1080/10601325.2015.980762
关键词
OES; radio frequency plasma; microwave plasma; thin film coating; PEDOT
资金
- TUBITAK/TEYDEB [9100036]
- Suleyman Demirel University Fund [3599D213]
PEDOT films were deposited by microwave (MW) and radio frequency (RF) plasma in a medium pressure of 0.02 Torr without precursor. In-situ optical emission spectroscopy (OES) measurement was carried out to determine plasma phase and to adjust discharge parameters. The other spectroscopic methods were used to characterize deposited thin films and to compare the effect of discharge parameters on the process. Conductivity values were found to be around up to 10(-5) S/cm for MW plasma, and 10(-8) S/cm for RF plasma deposited PEDOT films, without the addition of a doping agent. It was found that both plasma polymerization methods resulted in crosslinked PEDOT structures.
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