期刊
CIRP ANNALS-MANUFACTURING TECHNOLOGY
卷 60, 期 1, 页码 583-586出版社
ELSEVIER
DOI: 10.1016/j.cirp.2011.03.071
关键词
Surface; Nano manufacturing; Rapid prototyping
资金
- National Research Foundation of Korea (NRF)
- Korea Government (MEST) [2010-0029227, 2010-0000520, 2010-0028174]
A novel nanoscale hybrid manufacturing process was developed by integrating the nano particle deposition system and focused ion beam. Thin films of metals and ceramics were deposited by NPDS which sprays nanosized particles at supersonic speed. FIB was adopted as a nanostructuring, i.e., profile cutting, tool of these thin films. By repeating the deposition and the profile cutting, multi-layered-nanostructures with thickness of 500 nm were made of different materials at room temperature. The room temperature deposition of various materials without using binders and controlled-nanoscale profile cutting provides two unique features of this technology in manufacturing of multi-layer 3D nanostructures. (C) 2011 CIRP.
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