期刊
CHINESE SCIENCE BULLETIN
卷 53, 期 2, 页码 183-187出版社
SCIENCE PRESS
DOI: 10.1007/s11434-008-0008-z
关键词
humidity sensor; anodic aluminum oxide; nanopore electrode
Through-hole structural humidity sensor was fabricated by radio-frequency magnetron sputtering deposition of gold electrodes on two sides of anodic aluminum oxide (AAO) membranes which were prepared by two-step anodization procedure at 0-5 degrees C and 40 V in 0.5 mol/L oxalic acid electrolyte. The investigation on the impedance at various humid conditions showed a linear relationship between impedance and relative humidity over the range of 12%-97% RH. Other excellent properties such as rapid response and good reproducibility were also obtained.
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