期刊
CHINESE PHYSICS B
卷 22, 期 11, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/1674-1056/22/11/118101
关键词
temperature sensor; thin films; annealing; aluminium phthalocyanine chloride
资金
- Center of Excellence for Advanced Materials Research (CEAMR), King Abdulaziz University, Jeddah [CEAMR-434-03]
This study presents the fabrication and temperature sensing properties of sensors based on aluminium phthalocyanine chloride (AlPcCl) thin films. To fabricate the sensors, 50-nm-thick electrodes with 50-mu m gaps between them are deposited on glass substrates. AlPcCl thin films with thickness of 50-100 nm are deposited in the gap between electrodes by thermal evaporation. The resistance of the sensors decreases with increasing thickness and the annealing at 100 degrees C results in an increase in the initial resistance of sensors up to 24%. The sensing mechanism is based on the change in resistance with temperature. For temperature varying from 25 degrees C to 80 degrees C, the change in resistance is up to 60%. Simulation is carried out and results obtained coincide with experimental data with an error of +/-1%.
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