期刊
CHEMISTRY OF MATERIALS
卷 24, 期 21, 页码 4051-4059出版社
AMER CHEMICAL SOC
DOI: 10.1021/cm3014978
关键词
atomic layer deposition; Pt; nanoparticle; nucleation; self-assembled monolayer
资金
- Department of Energy [DE-SC0004782]
- American Chemical Society
- Center on Nanostructuring for Efficient Energy Conversion, an Energy Frontier Research Center
- U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences [DE-SC0001060]
- Bell Laboratories Graduate Fellowship Research Program
We demonstrate a method for growing metal nanoparticles (NPs) by atomic layer deposition (ALD) with the ability to vary aerial density and NP size using nucleation control. Self-assembled monolayers (SAMs) preadsorbed on the substrate serve as a template for subsequent growth of the NPs by ALD. Defects in the SAM resulting from incomplete formation time in solution are shown to act as nucleation sites for Pt. The strategy is demonstrated experimentally using ALD of Pt from a metal organic Pt precursor and O-2 counter reactant on silicon dioxide surfaces pretreated with octadecyltrichlorosilane SAMs. The aerial density and mean diameter of the Pt NPs are controlled by changing the SAM dip time and the number of ALD cycles. An isothermal nucleation model was developed in which several nucleation behaviors were considered in comparison with experimental data. A model incorporating nucleation incubation provided the best fit to the data.
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