Liquid-phase Patterning and microstructure of anatase TiO2 films on SnO2:F substrates using superhydrophilic surface

Liquid-phase patterning of crystalline anatase TiO2 thin films on SnO2:F substrates was successfully achieved using a superhydrophilic surface. The superhydrophilic surface on the SnO2:F substrate was micropatterned by UV irradiation (184.9 and 253.7 nm) through a photomask. The substrate was then immersed in an aqueous solution containing ammonium hexafluorotitanate and boric acid at 50 degrees C. Anatase TiO2 crystallized to form thin films on the superhydrophilic regions selectively because of the acceleration of nucleation and crystal growth. A micropattern of anatase TiO2 was thus fabricated on a SnO2:F substrate in the aqueous solution without any insulating layers, which decrease electrical conductivity between the TiO2 film and SnO2:F substrate. The micropattern was constructed of anatase TiO2 film, in which an assembly of nano TiO2 crystals covered the surface.