Sol-gel synthesis of low-loss MgTiO3 thin films by a non-methoxyethanol route

A cost-effective and hazard-free sol-gel method for the synthesis of single-phase MgTiO3 thin film is reported here, using (MgNO3)(2)center dot 6H(2)O and TiC16H36O4 as precursors and employing either acetic acid or acetyl acetone as the stabilizers for titanium n-butoxide. The effect of the stabilizers on the structure, microstructure and electrical properties is evaluated. Acetyl-acetone-based films have a denser and more homogeneous microstructure than the acetic-acid-derived films, which is directly reflected in their dielectric properties. Acetyl acetone derived films annealed at 700 degrees C exhibit a dielectric constant, epsilon(r) = 16.3 and dielectric loss, tan delta = 0.0021 at 1 MHz. The differences are attributed to the lower reactivity of acetylacetone-stabilized sols and higher crystallization temperature of acetyl acetone derived films.