期刊
CHEMICAL PHYSICS LETTERS
卷 467, 期 4-6, 页码 331-334出版社
ELSEVIER
DOI: 10.1016/j.cplett.2008.11.022
关键词
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资金
- National Research Laboratory [R0A-2007-000-20075-0]
- Korean Ministry of Science and Technology ( MOST)
- Korean Research Foundation [KRF-2005-042-D00203]
- National Research Foundation of Korea [R0A-2007-000-20075-0, 2005-042-D00203] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
The growth kinetics of Si nanowires produced by a vapour-liquid-solid (VLS) mechanism in conjunction with Pt and Au catalysts, respectively, was investigated and compared. Pt was employed as a VLS catalyst for single-crystal Si nanowires in a SiCl4-based chemical vapour deposition process. The growth rates were higher with Pt than with Au under all processing conditions. The activation energy was measured as 80 and 130 kJ/mol with the Pt and Au catalysts, respectively. The present results suggest that the rate-determining step is the incorporation of Si atoms in the lattice at the liquid/solid interfaces and, furthermore, the metal catalysts affect this step, resulting in different activation energy. (c) 2008 Elsevier B. V. All rights reserved.
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