期刊
NANOTECHNOLOGY
卷 11, 期 3, 页码 161-164出版社
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/11/3/304
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The reflection properties of 300 nm periodically structured silicon surfaces with depth varying between 35 and 190 nm, prepared by interference lithography, were examined in the range 200 nm < lambda < 3000 nm. A decrease in the reflectivity that becomes stronger with increasing structure depth is observed below 1000 nm. This broad-band reduction is caused by diffraction effects at short wavelengths and by the 'moth-eye effect' at long wavelengths. The results show a universal behaviour in the optical-path to wavelength ratio dependence of the reflectivity and are in good agreement with the results obtained for the 'moth-eye effect' from the effective medium theory.
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