Defects in semiconductors and their effects on devices

The classification of defects in semiconductors and their electronic properties are discussed. The sources of dislocations in bulk crystals and defects in epitaxial layers have been identified. Some of the approaches used to lower the density of dislocations in crystals and layers are presented. Effects of defects on devices are also considered. (C) 2000 Acta Metallurgica Inc. Published by Elsevier Science Ltd. All rights reserved.