期刊
JOURNAL OF THE AMERICAN CERAMIC SOCIETY
卷 83, 期 1, 页码 41-46出版社
AMER CERAMIC SOC
DOI: 10.1111/j.1151-2916.2000.tb01145.x
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The corrosion of aluminum nitride (AIN) in aqueous solutions has been evaluated in situ, using an ammonium/ammonia ion-selective electrode. The corrosion behavior of AIN over a pH range of 5.5-12 indicates that the corrosion products that are formed act as a protective barrier layer in the pH regime where they have the lowest stability, An insoluble barrier layer is formed via the oxidation of the AM surface in air at a temperature of 750 degrees C for 10 min. This oxynitride layer, which is 200 Angstrom thick, prevents the corrosion of the AlN in a pH 9.5 aqueous solution; however, the thermal conductivity is reduced by 6.6%.
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