期刊
IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 47, 期 3, 页码 560-568出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/16.824729
关键词
eddy currents; inductor model; on-chip inductors; quality factor; self resonance; substrate loss
This paper presents a physical model for planar spiral inductors on silicon, which accounts for eddy current effect in the conductor, crossover capacitance between the spiral and center-tap, Capacitance between the spiral and substrate, substrate ohmic loss, and substrate capacitance. The model has been confirmed with measured results of inductors having a wide range of layout and process parameters. This scalable inductor model enables the prediction and optimization of inductor performance.
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