期刊
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY
卷 15, 期 1, 页码 73-78出版社
ROYAL SOC CHEMISTRY
DOI: 10.1039/a906552k
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Investigations have been performed using microsecond pulsed glow discharge atomic emission spectrometry (GD-AES) to determine the effect of the glow discharge parameters, including applied pulse voltage, pulse width, pulse frequency and gas pressure, on the resolution of depth profiling. The results indicate that a concave crater profile is obtained for low voltage, whereas the curvature is convex for high voltage. The criteria of a flat crater bottom and good depth resolution are fulfilled only with a limited range of voltages at each operating pressure. The results also imply that the pulse frequency and pulse width have little effect on the resolution of depth profiling; thus a wide dynamic range of layers from several nanometers to tens of micrometers can be analyzed by increasing or decreasing the pulse frequency and width. Under the optimized parameters, a thin coating of Cu (50 nm) on steel, an electroplated steel and a computer hard-disk with multiple thin layers were analyzed.
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