Development of a sub-eV resolution soft-X-ray spectrometer for a transmission electron microscope

We constructed a grazing-incidence soft-X-ray spectrometer for a transmission electron microscope. The spectrometer, which was composed of a grating and a CCD detector, was attached to a JEM2000FX transmission electron microscope. B It-emission spectra of hexagonal boron-nitride, which give the density of states of the valence band of the material, were obtained with an energy resolution of about 0.6 eV.