期刊
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
卷 15, 期 3, 页码 465-470出版社
TECHNICAL ASSOC PHOTOPOLYMERS,JAPAN
DOI: 10.2494/photopolymer.15.465
关键词
block-copolymer; self-assembling; reactive-ion etching; patterned media
Block-copolymers are known to generate nano-scale microdomains by microphase-separation, if they are annealed at a temperature lower than their order-disorder transition temperatures. We tried to transfer microdomains onto substrates by only using the reactive-ion etching method, which is widely used in semiconductor manufacturing processes. Block-copolymers consisting of an aromatic polymer and an acrylic polymer were used since there is a big difference in the dry-etch resistance, and nanometer-scale dot patterns can be easily obtained on the substrates. Regarding the application of this nano-patterning technique, we demonstrated the first circumferential magnetic patterned media for hard disk, which were prepared on a 2.5-inch diameter glass plate.
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