期刊
CERAMICS INTERNATIONAL
卷 39, 期 1, 页码 887-890出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.ceramint.2012.06.035
关键词
Semiconductor; Vertical nanorod array; ZnO atomic layer deposition; Gas sensor
资金
- Korea Research Foundation [KRF-2008-313-C00309, KRF-2007-C00111]
- Brain Korea 21 Project
- National Research Foundation of Korea [2008-313-C00309] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
We report a vertical ZnO nanorod array as a highly sensitive hydrogen gas sensor. The vertical ZnO nanorod array on an Nb/Si substrate was fabricated using an anodized aluminum oxide nanotemplate and an atomic layer deposition method. The vertical ZnO nanorod array hydrogen gas sensor exhibited a high sensitivity for hydrogen in a wide concentration range. (C) 2012 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
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